光刻物镜,lithography lens
design of lithography lens光刻物镜设计
3)photolithographic lenses投影光刻物镜
1.Optical assembly and rectification of sub micro (i line and g line)photolithographic lenses;亚微米(i线和g线)投影光刻物镜的光学装校
4)Lithography Lenses大视场光刻物镜
5)projective lens光刻镜头
1.In this paper, author mainly introduced the basic requirement,craftwork method and guarantee measurement in assemble structure,material,procession, centering, inspection, adjustment and junction ofprojective lens of stepper.重点介绍投影光刻镜头的装配结构、材料和加工、定心、检测、调整、连接等关键工艺环节的基本要求、工艺方法和保证措施。
6)Low Light lens微光物镜
延伸阅读
暗箱物镜分子式：CAS号：性质：又称照相物镜。光谱摄谱仪的光学元件之一。其作用为光源辐射经光栅或棱镜色散后，将不同波长的平行光束聚焦，并在焦面上得到清晰的谱线影像构成光谱。
